SiC-SiO2 MEMS-DBR based widely tunable optical filters around 1550 nm with narrow FWHM

Julijan Cesar, Sujoy Paul, Franko Kuppers, Thomas Kusserow

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Аннотация

Ever growing optical data transmission networks and miniaturization of spectroscopic equipment demand for small, energy efficient and mass-produced optical components. Here we present distributed Bragg reflector (DBR) mirror based widely tunable optical Fabry-Perot filters comprising a novel material combination namely, silicon carbide (SiC) and silicon dioxide (SiO2) layers with refractive indices of 2.46 and 1.45, respectively. The resulting refractive index step of 1, provides high reflectivites (>99.5%) with wide stopbands of more than 300 nm [1]. Hence, large wavelength tuning range and a narrow full width at half maximum (FWHM) filtered signals can be produced. Structuring the dielectric layers by surface micromachining creates a free standing movable mirror supported by four beams. Due to inherent stress created during low-temperature plasma enhanced chemical vapor depositions (PECVD) we obtain a tunable stable plane concave resonator. In the end the cross section of a filter shows a fixed bottom DBR deposited on a silicon substrate, a tunable airgap and an electrothermally actuated top MEMS DBR with a gold electrode for heating current IMEMS. On the substrate backside where the filtered signal is exiting an anti-reflection coating is deposited.

Язык оригиналаАнглийский
Название основной публикации2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
ИздательInstitute of Electrical and Electronics Engineers Inc.
ISBN (электронное издание)9781728104690
DOI
СостояниеОпубликовано - июн. 2019
Опубликовано для внешнего пользованияДа
Событие2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Германия
Продолжительность: 23 июн. 201927 июн. 2019

Серия публикаций

НазваниеOptics InfoBase Conference Papers
ТомPart F140-CLEO_Europe 2019

Конференция

Конференция2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Страна/TерриторияГермания
ГородMunich
Период23/06/1927/06/19

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