Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Evgeny Sysoev, Sergey Kosolobov, Rodion Kulikov, Alexander Latyshev, Sergey Sitnikov, Ignat Vykhristyuk

Результат исследований: Вклад в журналСтатьярецензирование

6 Цитирования (Scopus)

Аннотация

We present an optical interference system nanoprofiler MNP-1 designed for high-precision noncontact measurement of surface relief with subnanometer resolution (root mean square of measured values), based on partial scanning of interference signal. The paper describes the construction of the measurement system with Linnik interferometer and the algorithm for nanorelief surface reconstruction. Experimental measurement results of silicon sample with profile height of surface structure of one interatomic distance obtained by MNP-1 are shown. It was proposed to use an atomically smooth surface as the reference mirror in the interferometer MNP-1 that allowed us to measure monatomic steps of the presented silicon sample. Monatomic steps of 0.31 nm in height on silicon (111) surface were measured with resolution up to 5 pm.

Язык оригиналаАнглийский
Страницы (с-по)213-218
Число страниц6
ЖурналMeasurement Science Review
Том17
Номер выпуска5
DOI
СостояниеОпубликовано - 1 окт. 2017
Опубликовано для внешнего пользованияДа

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