High-frequency metallic nanomechanical resonators

T. F. Li, Yu A. Pashkin, O. Astafiev, Y. Nakamura, J. S. Tsai, H. Im

Результат исследований: Вклад в журналСтатьярецензирование

44 Цитирования (Scopus)

Аннотация

We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators.

Язык оригиналаАнглийский
Номер статьи043112
ЖурналApplied Physics Letters
Том92
Номер выпуска4
DOI
СостояниеОпубликовано - 2008
Опубликовано для внешнего пользованияДа

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