An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method

S. A. Portnov, A. M. Yashchenok, A. S. Gubskii, D. A. Gorin, A. A. Neveshkin, B. N. Klimov, A. A. Nefedov, M. V. Lomova

Результат исследований: Вклад в журналСтатьярецензирование

18 Цитирования (Scopus)

Аннотация

A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.

Язык оригиналаАнглийский
Страницы (с-по)849-854
Число страниц6
ЖурналInstruments and Experimental Techniques
Том49
Номер выпуска6
DOI
СостояниеОпубликовано - дек. 2006
Опубликовано для внешнего пользованияДа

Fingerprint

Подробные сведения о темах исследования «An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method». Вместе они формируют уникальный семантический отпечаток (fingerprint).

Цитировать