10-Gb/s direct modulation of widely tunable 1550-nm MEMS VCSEL

Sujoy Paul, Christian Gierl, Julijan Cesar, Quang Trung Le, Mohammadreza Malekizandi, Benjamin Kögel, Christian Neumeyr, Markus Ortsiefer, Franko Küppers

Результат исследований: Вклад в журналСтатьярецензирование

35 Цитирования (Scopus)


We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiOx/SiNy-based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a lowtemperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S21) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.

Язык оригиналаАнглийский
Номер статьи7073611
ЖурналIEEE Journal of Selected Topics in Quantum Electronics
Номер выпуска6
СостояниеОпубликовано - 1 нояб. 2015
Опубликовано для внешнего пользованияДа


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