Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95 μm

Karolina Zogal, Tobias Gruendl, Christian Gierl, Sujoy Paul, Christian Grasse, Peter Meissner, Markus Christian Amann, Franko Kueppers

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


We present surface micro-machined micro-electro mechanical-system (MEMS) tunable vertical-cavity surfaceemitting lasers (VCSEL) with rectangular and triangular shaped quantum wells (QWs) emitting around 1:95 μm predestined for broadband tunable diode laser absorption spectroscopy. The VCSELs show single-mode operation and high side-mode suppression-ratio SMSR > 50 dB within the whole tuning range of 50nm and 35 nm, the fibre-coupled optical power of 1:0mW and 1:76mW and the threshold current of 2:5mA and 2:0mA for the rectangular and triangular shaped QWs respectively. The 3 dB modulation frequency of the MEMS is 110 Hz.

Original languageEnglish
Title of host publicationVertical-Cavity Surface-Emitting Lasers XVII
Publication statusPublished - 2013
Externally publishedYes
EventVertical-Cavity Surface-Emitting Lasers XVII - San Francisco, CA, United States
Duration: 6 Feb 20137 Feb 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceVertical-Cavity Surface-Emitting Lasers XVII
Country/TerritoryUnited States
CitySan Francisco, CA


  • Gas-sensing
  • MEMS
  • Surface micro-machining
  • Tunable diode laser absorbtion spectroscopy
  • Tunable VCSEL


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