Thermodynamic mechanism of the intermixing of multilayered structures in the SiOx/SiO2 superlattices with nanometer thick layers

Andrey Sarikov, Denis Zhigunov

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In this paper, a thermodynamic model of the behavior of superlattices consisting of alternating Si-rich oxide (SiOx) and SiO2 layers, during high temperature annealing, is presented. It is demonstrated that complete layer intermixing and breakdown of superlattice structure are expected in such superlattices at specific relations between the thicknesses of neighboring layers and for definite SiOx stoichiometries. The mechanism of this process is related to the decrease of the Gibbs free energy of intermixed superlattice state as compared to initial one if the higher kinetic efficiency condition of layer intermixing over SiOx phase separation is satisfied. The intermixing behavior of the Si oxide based superlattices is studied as a function of the initial characteristics of superlattice and the annealing temperature. The criteria for the complete layer intermixing are established. The correspondence between theoretical predictions and experimental data is discussed in terms of the borderline character of the SiOx and SiO2 layer interaction during annealing.

Original languageEnglish
Pages (from-to)163-169
Number of pages7
JournalMaterials Today Communications
Volume13
DOIs
Publication statusPublished - Dec 2017
Externally publishedYes

Keywords

  • Gibbs free energy
  • Layer intermixing
  • Phase transformations
  • Si oxide superlattices
  • Thermodynamic modeling

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