The gas multisensor chip fabricated by direct electrochemical deposition of tin oxide

F. S. Fedorov, D. V. Podgainov, A. S. Varezhnikov, A. V. Lashkov, V. S. Dykin, M. E. Toimil-Molares, V. V. Sysoev

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

We report a direct synthesis of tin oxide layers onto Si/SiO2 chip equipped with Pt multiple electrodes to develop new gas-analytical multisensor arrays. The tailored local morphology of the layer makes it possible to differentiate the gas response of each layer segment and to build a gas-selective vector signal recognized by pattern recognition algorithms in frames of conventional multisensor principles. The response of the chip to alcohols is in the ppm range.

Original languageEnglish
Title of host publication2015 IEEE SENSORS - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479982028
DOIs
Publication statusPublished - 31 Dec 2015
Externally publishedYes
Event14th IEEE SENSORS - Busan, Korea, Republic of
Duration: 1 Nov 20154 Nov 2015

Publication series

Name2015 IEEE SENSORS - Proceedings

Conference

Conference14th IEEE SENSORS
Country/TerritoryKorea, Republic of
CityBusan
Period1/11/154/11/15

Keywords

  • electrochemical deposition
  • gas sensor
  • multisensor array
  • pattern recognition
  • tin oxide

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