The application of nanotubular titanium dioxide for gas sensors

M. Y. Vasilkov, F. S. Fedorov, A. V. Lashkov, A. S. Varezhnikov, M. A. Solomatin, V. V. Sysoev

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The work considers possibilities to employ nanotubular (NT) titanium dioxide layers in order to develop gas sensors. The NT TiO2 layers have been fabricated by electrochemical anodizing of Ti foil with subsequent dissolution of metal layer. The technique to apply TiO2 NT layer over the substrate equipped with strip coplanar electrodes is developed. It has been found that the TiO2 NTs exhibit a considerable chemiresistive effect at temperatures over 300 °C versus a number of organic vapors under ppm concentrations in air.

Original languageEnglish
Title of host publicationConference Proceedings - 2016 International Conference on Actual Problems of Electron Devices Engineering, APEDE 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509017126
DOIs
Publication statusPublished - 22 Sep 2016
Externally publishedYes
Event2016 International Conference on Actual Problems of Electron Devices Engineering, APEDE 2016 - Saratov, Russian Federation
Duration: 22 Sep 201623 Sep 2016

Publication series

NameConference Proceedings - 2016 International Conference on Actual Problems of Electron Devices Engineering, APEDE 2016
Volume2

Conference

Conference2016 International Conference on Actual Problems of Electron Devices Engineering, APEDE 2016
Country/TerritoryRussian Federation
CitySaratov
Period22/09/1623/09/16

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