Surface micromachined tunable 1.55 μm-VCSEL with 102nm continuous single-mode tuning

C. Gierl, T. Gruend, P. Debernardi, K. Zogal, C. Grasse, H. A. Davani, G. Böhm, S. Jatta, F. Küppers, P. Meißner, M. C. Amann

Research output: Contribution to journalArticlepeer-review

103 Citations (Scopus)


For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3:5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

Original languageEnglish
Pages (from-to)17336-17343
Number of pages8
JournalOptics Express
Issue number18
Publication statusPublished - 29 Aug 2011
Externally publishedYes


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