Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning

C. Gierl, T. Gründl, K. Zogal, H. A. Davani, C. Grasse, G. Böhm, F. Küppers, P. Meissner, M. C. Amann

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74nm in the range of 1.55m and a wavelength tuning speed of ∼200kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiO x and SiN y deposited with low temperature (<100°C) plasma enhanced chemical vapour deposition. The maximum fibre-coupled optical output power of the VCSEL is 1.8mW and >1mW over the entire tuning range. The sidemode suppression ratio is >40dB.

Original languageEnglish
Pages (from-to)1243-1244
Number of pages2
JournalElectronics Letters
Issue number22
Publication statusPublished - 27 Oct 2011
Externally publishedYes


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