SiC-SiO2 MEMS-DBR based widely tunable optical filters around 1550 nm with narrow FWHM

Julijan Cesar, Sujoy Paul, Franko Kuppers, Thomas Kusserow

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Ever growing optical data transmission networks and miniaturization of spectroscopic equipment demand for small, energy efficient and mass-produced optical components. Here we present distributed Bragg reflector (DBR) mirror based widely tunable optical Fabry-Perot filters comprising a novel material combination namely, silicon carbide (SiC) and silicon dioxide (SiO2) layers with refractive indices of 2.46 and 1.45, respectively. The resulting refractive index step of 1, provides high reflectivites (>99.5%) with wide stopbands of more than 300 nm [1]. Hence, large wavelength tuning range and a narrow full width at half maximum (FWHM) filtered signals can be produced. Structuring the dielectric layers by surface micromachining creates a free standing movable mirror supported by four beams. Due to inherent stress created during low-temperature plasma enhanced chemical vapor depositions (PECVD) we obtain a tunable stable plane concave resonator. In the end the cross section of a filter shows a fixed bottom DBR deposited on a silicon substrate, a tunable airgap and an electrothermally actuated top MEMS DBR with a gold electrode for heating current IMEMS. On the substrate backside where the filtered signal is exiting an anti-reflection coating is deposited.

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728104690
DOIs
Publication statusPublished - Jun 2019
Externally publishedYes
Event2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F140-CLEO_Europe 2019

Conference

Conference2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Country/TerritoryGermany
CityMunich
Period23/06/1927/06/19

Fingerprint

Dive into the research topics of 'SiC-SiO2 MEMS-DBR based widely tunable optical filters around 1550 nm with narrow FWHM'. Together they form a unique fingerprint.

Cite this