Response to “Comment on ‘Thickness and temperature depending intermixing of SiOx/SiO2 and SiOxNy/SiO2 superlattices: Experimental observation and thermodynamic modeling'” [Appl. Phys. Lett. 109, 166101 (2016)]

D. M. Zhigunov, A. Sarikov, Yu M. Chesnokov, A. L. Vasiliev, N. Zakharov, P. K. Kashkarov

Research output: Contribution to journalComment/debate

2 Citations (Scopus)
Original languageEnglish
Article number166102
JournalApplied Physics Letters
Volume109
Issue number16
DOIs
Publication statusPublished - 17 Oct 2016
Externally publishedYes

Cite this