Pyramid-like Si structures grown on the step bunched Si(111)-(7×7) surface

Dmitry I. Rogilo, Lyudmila I. Fedina, Sergey S. Kosolobov, Alexander V. Latyshev, Bogdan S. Ranguelov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

Pyramid-like Si structures have been observed on large (5 m) atomically flat terraces of the step bunched Si (111)-(7̃7) surface during Si deposition at T 600°-760°C in the ultrahighvacuum reflection electron microscope (UHV REM). Such structures are the result of sequential two-dimensional island nucleation and growth (2DNG) accompanied by reducing a terrace width after each monolayer formation. The critical terrace width, at which the next 2DNG layer starts, is measured depending on substrate temperature and Si deposition rate. Two different activation energies of 2DNG layer formation (E2D) are found out: E2D ≈ 2.4 eV at T 700°C and E2D ≈ 0.5 eV at T 700°C. Based on experimental data a critical cluster size for 2D-island nucleation is determined to be 7-10 atoms.

Original languageEnglish
Title of host publication12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings
Pages91-95
Number of pages5
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Erlagol, Altai, Russian Federation
Duration: 30 Jun 20114 Jul 2011

Publication series

Name12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings

Conference

Conference12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011
Country/TerritoryRussian Federation
CityErlagol, Altai
Period30/06/114/07/11

Keywords

  • homoepitaxial growth
  • morphology
  • Silicon
  • Superstructure

Fingerprint

Dive into the research topics of 'Pyramid-like Si structures grown on the step bunched Si(111)-(7×7) surface'. Together they form a unique fingerprint.

Cite this