Phase trimming of Mach-Zehnder interferometers by laser annealing of germanium implanted waveguides

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F.J. Runge, S. Mailis, A. C. Peacock, G. T. Reed

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

We demonstrate a new post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. Preliminary results demonstrate a phase trimming accuracy of 0.146π.

Original languageEnglish
Title of host publication14th International Conference on Group IV Photonics, GFP 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages39-40
Number of pages2
ISBN (Electronic)9781509065684
DOIs
Publication statusPublished - 24 Oct 2017
Externally publishedYes
Event14th International Conference on Group IV Photonics, GFP 2017 - Berlin, Germany
Duration: 23 Aug 201725 Aug 2017

Publication series

Name14th International Conference on Group IV Photonics, GFP 2017

Conference

Conference14th International Conference on Group IV Photonics, GFP 2017
Country/TerritoryGermany
CityBerlin
Period23/08/1725/08/17

Keywords

  • Integrated optical devices
  • Mach-Zehnder interferometer
  • Optical Waveguide
  • Silicon-on-insulator

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