Permanent holographic recording in sputtered indium oxide (InOx) thin films is demonstrated, using ultraviolet radiation at 193 nm emitted by an ArF excimer laser. Steady-state refractive index changes of up to 5×10-3 are calculated from the measured diffraction efficiency of a HeNe laser probe beam. The recorded gratings exhibit a dynamic behaviour that relaxes to a steady-state value that depends on the oxygen partial pressure used during growth and on the recording beam intensity. The observed behaviour is explained in terms of laser-induced structural changes.
|Number of pages||4|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - Sep 1999|