Nucleation of two-dimensional Si islands near a monatomic step on an atomically clean Si(111)-(7×7) surface

D. I. Rogilo, N. E. Rybin, S. S. Kosolobov, L. I. Fedina, A. V. Latyshev

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1 Citation (Scopus)

Abstract

The process of nucleation of 2D islands near a monatomic step at the initial stage of growing of a silicon film on the Si(111)-(7 × 7) surface is studied by means of in situ ultrahighvacuum reflection electron microscopy. The dependence of the depletion region width W near the step, where no islands are formed, on the deposition rate R is described by the expression W2 ∝ R with the exponent χ = 1.18 and χ = 0.63 at temperatures of 650 and 680 °C, respectively. It is demonstrated that the change in χ is associated with the step structure, which provides the transformation from the growth kinetics limited by attachment of adatoms to the step to that limited by diffusion of adatoms. A competition of the processes of nucleation and attachment to the step leads to an increase in the critical size of the island nucleus from i = 1 far from the step to i = 3–5 near the step and to i = 6–8 on the terrace of critical width for 2D nucleation.

Original languageEnglish
Pages (from-to)286-291
Number of pages6
JournalOptoelectronics, Instrumentation and Data Processing
Volume52
Issue number3
DOIs
Publication statusPublished - 1 May 2016
Externally publishedYes

Keywords

  • atomic steps
  • critical nucleus
  • epitaxial growth
  • reflection electron microscopy
  • silicon
  • surface diffusion
  • two-dimensional islands

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