Novel carbon nanotube network deposition technique for electronic device fabrication

Marina Y. Zavodchikova, Albert G. Nasibulin, Tero Kulmala, Kestutis Grigoras, Anton S. Anisimov, Sami Franssila, Vladimir Ermolov, Esko I. Kauppinen

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

We present a novel dry and room-temperature method for the deposition of random carbon nanotube networks (CNTNs) onto various substrates. This method is based on natural charging of carbon nanotube (CNT) bundles in the gas-phase and their efficient deposition directly downstream of the synthesis reactor by means of an electric field. The density of the deposited CNTNs was controllably adjusted by varying the deposition time and the electric field strength. Application of this deposition technique for the fabrication of single-walled CNTN-based field-effect transistors (FETs), where a random CNTN serves as a transport channel, is presented.

Original languageEnglish
Pages (from-to)2272-2275
Number of pages4
JournalPhysica Status Solidi (B) Basic Research
Volume245
Issue number10
DOIs
Publication statusPublished - Oct 2008
Externally publishedYes

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