New technique for fabrication of surface relief Ti-indiffused LiNbO3 waveguides

S. Mailis, G. W. Ross, L. Reekie, J. A. Abernethy, R. W. Eason

Research output: Contribution to conferencePaperpeer-review

Abstract

A new method to fabricate surface relief Ti-indiffused LiNbO3 waveguides is presented. The method combines surface damage produced by an excimer laser followed by wet etching. The acid preferentially attacks the laser modified areas and the depth of the pattern is controllable via the etching time.

Original languageEnglish
Pages322-323
Number of pages2
Publication statusPublished - 2000
Externally publishedYes
EventConference on Lasers and Electro-Optics (CLEO 2000) - San Francisco, CA, USA
Duration: 7 May 200012 May 2000

Conference

ConferenceConference on Lasers and Electro-Optics (CLEO 2000)
CitySan Francisco, CA, USA
Period7/05/0012/05/00

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