Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

E. Salvati, L. R. Brandt, C. Papadaki, H. Zhang, S. M. Mousavi, D. Wermeille, A. M. Korsunsky

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds