Lithography-free fabrication of carbon nanotube network transistors

Marina Y. Timmermans, Kestutis Grigoras, Albert G. Nasibulin, Ville Hurskainen, Sami Franssila, Vladimir Ermolov, Esko I. Kauppinen

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Abstract

A novel non-lithographic technique for the fabrication of carbon nanotube thin film transistors is presented. The whole transistor fabrication process requires only one mask which is used both to pattern transistor channels based on aerosol synthesized carbon nanotubes and to deposit electrodes by metal evaporation at different angles. An important effect of electrodynamic focusing was utilized for the directed assembly of transistor channels with feature sizes smaller than the mask openings. This dry non-lithographic method opens up new avenues for device fabrication especially for low cost flexible and transparent electronics.

Original languageEnglish
Article number065303
JournalNanotechnology
Volume22
Issue number6
DOIs
Publication statusPublished - 11 Feb 2011
Externally publishedYes

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