Liquid deposition at micro and nanoscale

Artur Lutfurakhmanov, Robert Sailer, Gregory Loken, Ananiy Kohut, Yechun Wang, Andriy Voronov, Douglas L. Schulz, Iskander S. Akhatov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

Micro/Nanolithography is a creation of micro/nano features on the substrate. This paper proposes a new capillary-based lithography method that is non-invasive to substrate. The application of the pressure from one side of capillary causes the liquid meniscus to form at the capillary outlet. Touching the substrate with the meniscus only causes the liquid deposition on the substrate. The size of deposited liquid droplet is about 10% of inner diameter of the capillary. Glycerol was chosen as a trial liquid of deposition, because the rate of evaporation for glycerol is low in comparison with other liquids. The deposition of glycerol was done in micro-scale. Comparison of theoretical results with experimental data is shown and discussed.

Original languageEnglish
Title of host publicationASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels Collocated with 3rd Joint US-European Fluids Engineering Summer Meeting, ICNMM2010
Pages799-804
Number of pages6
EditionPARTS A AND B
DOIs
Publication statusPublished - 2010
Externally publishedYes
EventASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels, ICNMM2010 Collocated with 3rd Joint US-European Fluids Engineering Summer Meeting - Montreal, QC, Canada
Duration: 1 Aug 20105 Aug 2010

Publication series

NameASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels Collocated with 3rd Joint US-European Fluids Engineering Summer Meeting, ICNMM2010
NumberPARTS A AND B

Conference

ConferenceASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels, ICNMM2010 Collocated with 3rd Joint US-European Fluids Engineering Summer Meeting
Country/TerritoryCanada
CityMontreal, QC
Period1/08/105/08/10

Keywords

  • Liquid droplet
  • Micro-capillary
  • Surface tension

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