Laser crystallized low-loss polycrystalline silicon waveguides

Yohann Franz, Antoine F.J. Runge, Swe Z. Oo, Gregorio Jimenez-Martinez, Noel Healy, Ali Khokhar, Antulio Tarazona, Harold M.H. Chong, Sakellaris Mailis, Anna C. Peacock

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5:3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.

Original languageEnglish
Pages (from-to)4462-4470
Number of pages9
JournalOptics Express
Volume27
Issue number4
DOIs
Publication statusPublished - 2019
Externally publishedYes

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