Laser assisted fabrication of porous polymer MEMS with nano structured additives

Igor V. Shishkovsky, Yuri G. Morozov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

Selective laser sintering (SLS) process was used to obtain nanostructured porous 3D objects consisting of Ni or/and Cu nanoclusters enveloped with a polycarbonate (PC) matrix for M/NEMS applications. The liquid phase SLS process was performed in air or Ar. The powder mixtures of Ni + PC in proportions 1:1, 1:2 (Ni particle size ranged from 27 to 184 nm) and Cu + PC = 1:9, 1:4, 3.7 (Cu particle size ranged from 76 to 90 nm) and a cw YAG:Nd+3 laser (P = 4-10 W) with defocused laser beam were used. Optimal regimes of laser treatment as monolayer as layerwise 3D part manufacturing in above mention nano compositions were determined. The scanning electronic microscopy (SEM) equipped EDX and qualitative XRD analysis showed that content and size of nanoparticles are remained unaffected after the liquid-phase sintering. It was shown a principle possibility of functional graded 3D parts fabrication via the interleaving of the metal - polymer powdered compositions with Ni and/or Cu additives, which ensures the nano particle sizes conservation. Proposed approach is opened a new way by deliberated M/NEMS device synthesis. Alternation of ferromagnetic and non-magnetic layers with Ni and/or Cu core - polymer shell structures was provided the interesting electro-physical properties of such devices.

Original languageEnglish
Title of host publicationPolymer-Based Materials and Composites - Synthesis, Assembly, Properties and Applications
Pages343-348
Number of pages6
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2010 MRS Fall Meeting - Boston, MA, United States
Duration: 29 Nov 20103 Dec 2010

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1312
ISSN (Print)0272-9172

Conference

Conference2010 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA
Period29/11/103/12/10

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