Laser annealing of low temperature deposited silicon waveguides

Y. Franz, A. F.J. Runge, S. Z. Oo, N. Healy, G. Martinez-Jimenez, A. Z. Khokhar, A. Tarazona, H. M.H. Chong, S. Mailis, A. C. Peacock

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.

Original languageEnglish
Title of host publication2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781943580279
DOIs
Publication statusPublished - 25 Oct 2017
Externally publishedYes
Event2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States
Duration: 14 May 201719 May 2017

Publication series

Name2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Volume2017-January

Conference

Conference2017 Conference on Lasers and Electro-Optics, CLEO 2017
Country/TerritoryUnited States
CitySan Jose
Period14/05/1719/05/17

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