High-frequency metallic nanomechanical resonators

T. F. Li, Yu A. Pashkin, O. Astafiev, Y. Nakamura, J. S. Tsai, H. Im

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)

Abstract

We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators.

Original languageEnglish
Article number043112
JournalApplied Physics Letters
Volume92
Issue number4
DOIs
Publication statusPublished - 2008
Externally publishedYes

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