Focused ion beam ring drilling for residual stress evaluation

Alexander M. Korsunsky, Marco Sebastiani, Edoardo Bemporad

Research output: Contribution to journalArticlepeer-review

136 Citations (Scopus)

Abstract

Focused Ion Beam (FIB) milling of ring-shaped trenches (ring drilling) induces controlled gradual strain relief at the surface of residually stressed samples, with the central "island" approaching the unstressed state. Strain change was measured at sample surface via Digital Image Correlation analysis of SEM micrographs of a regular pattern of dots deposited on the sample surface prior to ring drilling. FE modeling of strain evolution with ring drilling depth agrees with experimental observations. The technique proposed represents a substantial improvement over prior attempts, constituting an efficient semi-destructive method for accurate residual stress evaluation at the (sub)micron scale.

Original languageEnglish
Pages (from-to)1961-1963
Number of pages3
JournalMaterials Letters
Volume63
Issue number22
DOIs
Publication statusPublished - 15 Sep 2009
Externally publishedYes

Keywords

  • Digital image correlation
  • Electron microscopy
  • Finite element modeling
  • Focused ion beam
  • Micro-mechanics
  • Residual stress

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