Far-field emission characteristics and linewidth measurements of surface micro-machined MEMS tunable VCSELs

Sujoy Paul, Christian Gierl, Tobias Grundl, Karolina Zogal, Peter Meissner, Markus Christian Amann, Franko Küppers

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)


In this paper, we demonstrate for the first time the far-field experimental results and the linewidth characteris- tics for widely tunable surface-micromachined micro-electro-mechanical system (MEMS) vertical-cavity surface- emitting lasers (VCSELs) operating at 1550 nm. The fundamental Gaussian mode emission is confirmed by optimizing the radius of curvature of top distributed Bragg reflector (DBR) membrane and by choosing an ap- propriate diameter of circular buried tunnel junctions (BTJs) so that only the fundamental Gaussian mode can sustain. For these VCSELs, a mode-hop free continuous tuning over 100 nm has already been demonstrated, which is achieved by electro-thermal tuning of the MEMS mirror. The fiber-coupled optical power of 2mW over the entire tuning range has been reported. The singlemode laser emission has more than 40 dB of side-mode suppression ratio (SMSR). The smallest linewidth achieved with these of MEMS tunable VCSELs is 98MHz which is one order of magnitude higher than that of fixed-wavelength VCSELs.

Original languageEnglish
Title of host publicationVertical-Cavity Surface-Emitting Lasers XVII
Publication statusPublished - 2013
Externally publishedYes
EventVertical-Cavity Surface-Emitting Lasers XVII - San Francisco, CA, United States
Duration: 6 Feb 20137 Feb 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceVertical-Cavity Surface-Emitting Lasers XVII
Country/TerritoryUnited States
CitySan Francisco, CA


  • Electro-thermal tuning
  • Far-field
  • Linewidth
  • MEMS
  • Surface micro-machining
  • Tunable VCSEL


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