Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals

Collin Sones, Sakellaris Mailis, Vasilis Apostolopoulos, Ian E. Barry, Corin Gawith, Peter G.R. Smith, Robert W. Eason

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photolithographic patterning, electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50 μm × 50 μm × 5 mm in the x, z and y crystallographic directions, respectively, have been fabricated.

Original languageEnglish
Pages (from-to)53-57
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number1
DOIs
Publication statusPublished - Jan 2002
Externally publishedYes

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