Emitting properties of a-Si:C:H films with a gold submicron grating

S. I. Pavlov, S. A. Dyakov, A. K. Samusev, A. V. Nashchekin, E. M. Tanklevskaya, N. A. Feoktistov, N. A. Gippius, S. G. Tikhodeev, D. Pidgayko, A. B. Pevtsov

    Research output: Contribution to journalConference articlepeer-review


    In this study reflection and photoluminescence spectra of a-Si:C:H thin film with gold grating on it was examined theoretically and experimentally. The hydrogenated amorphous amorphous silicon-carbon alloy films were fabricated by the PECVD technique. Arrays of gold stripes with different gold width were created by lift-off e-beam lithography. Reflection, and PL spectra has been measured by a Fourier imaging spectroscopy. The theoretical calculations are in a good agreement with experimental results. From the PL spectra it follows, that the TE polarization gives sharper and more efficient PL signal than the TM polarization, and PL efficiency almost does not depend on gold stripes widths. It was shown that only in TE modes the PL outcouples from the gratings owing to the fact that there is no plasmon's affect in this polarization.

    Original languageEnglish
    Article number012126
    JournalJournal of Physics: Conference Series
    Issue number1
    Publication statusPublished - 23 Apr 2020
    Event4th International Conference on Metamaterials and Nanophotonics, METANANO 2019 - St. Petersburg, Russian Federation
    Duration: 15 Jul 201919 Jul 2019


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