Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

A. M. Malik, O. J.L. Fox, L. Alianelli, A. M. Korsunsky, R. Stevens, I. M. Loader, M. C. Wilson, I. Pape, K. J.S. Sawhney, P. W. May

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Engineering & Materials Science

Chemical Compounds