Controllable chemical vapor deposition synthesis of carbon layers on copper substrate

Mariya Kozlova, Tatiana Larionova, Tatiana Koltsova, Daria Kopylova, Oleg Tolochko

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    The paper studies the effect of technological parameters of the deposition process from the gas phase to the thickness of the carbon layers and their functional characteristics. Graphene and graphite layers have been synthesized by varying total pressure, methane partial pressure and temperature of synthesis. The synthesized films demonstrate an absorption in the range from 4.4% to 99.5% and electrical resistivity varying from 0.14 to 2 kΩ/sq. The obtained results make possible controllable synthesis of carbon films with specified characteristics for use as a photodetectors.

    Original languageEnglish
    Title of host publicationEngineering Materials and Tribology XXV
    EditorsDagnija Loca
    PublisherTrans Tech Publications Ltd
    Pages263-266
    Number of pages4
    ISBN (Print)9783035710724
    DOIs
    Publication statusPublished - 2017
    Event25th International Baltic Conference of Engineering Materials and Tribology – BALTMATTRIB - Riga, Latvia
    Duration: 3 Nov 20164 Nov 2016

    Publication series

    NameKey Engineering Materials
    Volume721 KEM
    ISSN (Print)1013-9826
    ISSN (Electronic)1662-9795

    Conference

    Conference25th International Baltic Conference of Engineering Materials and Tribology – BALTMATTRIB
    Country/TerritoryLatvia
    CityRiga
    Period3/11/164/11/16

    Keywords

    • Absorption
    • Atmosphere pressure
    • Electrical resistivity
    • Graphene layers
    • Temperature

    Fingerprint

    Dive into the research topics of 'Controllable chemical vapor deposition synthesis of carbon layers on copper substrate'. Together they form a unique fingerprint.

    Cite this