Continuously tunable, polarization stable SWG MEMS VCSELs at 1.55 μ m

Tobias Grundl, Karolina Zogal, Pierluigi Debernardi, Michael Muller, Christian Grasse, Kathrin Geiger, Ralf Meyer, Gerhard Bohm, Markus Christian Amann, Franko Kuppers, Peter Meissner

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14 Citations (Scopus)


We present polarization stable, tunable long-wavelength vertical-cavity-surface-emitting lasers (VCSELs) at 1.55 μ m based on InP. The tuning is accomplished by a two-chip membrane mounting technique denoted as bulk-micro-machining. The membrane consists of a GaAs-based distributed Bragg reflector and represents the top mirror. By its electro thermal actuation, cavity tuning occurs. This results in a continuous wavelength shift. Polarization stability is achieved by an implemented semiconductor/air subwavelength grating (SWG) written in the top-most layers of the membrane facing the VCSEL eye after mounting process. The SWG integration is realized by a combination of holographic lithography, barrel, and reactive ion etching. The manufactured micro-electro-mechanical-system SWG-VCSELs show a continuous, polarization stable wavelength tuning of ∼ 25 nm with a peak optical power of 4 mW fiber-coupled in an MMF and thresholds of 3-3.5 mA.

Original languageEnglish
Article number6472020
Pages (from-to)841-843
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number9
Publication statusPublished - 2013
Externally publishedYes


  • InP
  • micro-electro- mechanical-system (MEMS)
  • subwavelength grating
  • tunable
  • vertical-cavity-surface-emitting laser (VCSEL)


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