Collimated aerosol beam deposition: Sub 5-μm resolution of printed actives and passives

D. L. Schulz, J. M. Hoey, D. Thompson, O. F. Swenson, S. Han, J. Lovaasen, X. Dai, C. Braun, K. Keller, I. S. Akhatov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Citations (Scopus)

Abstract

Materials deposition based upon directed aerosol flow has the potential of finding application in the field of flexible electronics where a low-temperature route to printed transistors with high mobilities remains elusive. NDSU has been actively engaged in addressing this opportunity from the following two perspectives: (1) developing an appreciation of the basic physics that dominate aerosol beam deposition toward engineering a robust method that allows the realization of deposited features with sub-5 μm resolution; and, (2) developing an understanding of the mechanistic transformations of silane-based precursor inks toward the formation of electronic materials at atmospheric-pressure. In this paper, we will briefly discuss the genesis of a new a materials deposition method termed collimated aerosol beam direct-write (CAB-DW) where precision linewidth control has been realized using a combined theoretical/ experimental approach. Next, we will discuss progress using Si 6H12 (cyclohexasilane - a liquid silane) as a precursor for solution-processed diodes and transistors. Finally, we demonstrate the ability to CAB-DW Si6H12-based precursor inks for printing Si-based semiconductors.

Original languageEnglish
Title of host publicationProceedings of the Academic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX
DOIs
Publication statusPublished - 2008
Externally publishedYes
EventAcademic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX - Phoenix, AZ, United States
Duration: 21 Jan 200824 Jan 2008

Publication series

NameProceedings of the Academic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX

Conference

ConferenceAcademic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX
Country/TerritoryUnited States
CityPhoenix, AZ
Period21/01/0824/01/08

Keywords

  • Aerodynamic focusing
  • Aerosol beam
  • Liquid silane
  • Printed electronics

Fingerprint

Dive into the research topics of 'Collimated aerosol beam deposition: Sub 5-μm resolution of printed actives and passives'. Together they form a unique fingerprint.

Cite this