Carbon nanotube network varactor

A. A. Generalov, I. V. Anoshkin, M. Erdmanis, D. V. Lioubtchenko, V. Ovchinnikov, A. G. Nasibulin, A. V. Räisänen

    Research output: Contribution to journalArticlepeer-review

    9 Citations (Scopus)


    Microelectromechanical system (MEMS) varactors based on a freestanding layer of single-walled carbon nanotube (SWCNT) films were designed, fabricated and tested. The freestanding SWCNT film was employed as a movable upper patch in the parallel plate capacitor of the MEMS. The measurements of the SWCNT varactors show very high tunability, nearly 100%, of the capacitance with a low actuation voltage of 10 V. The functionality of the varactor is improved by implementing a flexible nanocellulose aerogel filling.

    Original languageEnglish
    Article number045201
    Issue number4
    Publication statusPublished - 30 Jan 2015


    • MEMS
    • SWCNT
    • Varactor


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