Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

Victor P. Kalinushkin, Vladimir A. Yuryev, Oleg V. Astafiev, Alexander N. Buzynin, Nikolay I. Bletskan

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics.

Original languageEnglish
Pages (from-to)615-620
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume378
DOIs
Publication statusPublished - 1995
Externally publishedYes
EventProceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA
Duration: 17 Apr 199521 Apr 1995

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