50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 m emission wavelength

Tobias Gruendl, Karolina Zogal, Pierluigi Debernardi, Christian Gierl, Christian Grasse, Kathrin Geiger, Ralf Meyer, Gerhard Boehm, Markus Christian Amann, Peter Meissner, Franko Kueppers

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