50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 m emission wavelength

Tobias Gruendl, Karolina Zogal, Pierluigi Debernardi, Christian Gierl, Christian Grasse, Kathrin Geiger, Ralf Meyer, Gerhard Boehm, Markus Christian Amann, Peter Meissner, Franko Kueppers

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

An investigation of micro-electro-mechanical-system vertical-cavity surface-emitting lasers at 1.95 m emission wavelength grown on InP is presented. The top sided distributed Bragg reflector has been substituted by a dielectric SiOx/SiNy membrane. Its deflection causes a continuous change of emission wavelength due to cavity tuning. The membrane actuation can be achieved in two different ways: by electrostatic attraction and electrothermal expansion. The recently developed surface-micro-machining technique allows both tuning mechanisms on one and the same device. The maximum achieved continuous tuning range is 50 nm with side-mode-suppression-ratios beyond 50 dB over the entire tuning range. Peak optical output powers of 1.0 to 1.8 mW with threshold current densities of 2.2 kA cm-2 will be presented.

Original languageEnglish
Article number012001
JournalSemiconductor Science and Technology
Volume28
Issue number1
DOIs
Publication statusPublished - Jan 2013
Externally publishedYes

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