3D surface topography imaging in SEM with improved backscattered electron detector: Arrangement and reconstruction algorithm

A. A. Borzunov, V. Y. Karaulov, N. A. Koshev, D. V. Lukyanenko, E. I. Rau, A. G. Yagola, S. V. Zaitsev

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)

    Abstract

    We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imaging of relatively smooth surface topography using the scanning electron microscope (SEM). The new arrangement of backscattered electrons detector plates allows decreasing the initial energy of the electron probe, which makes this SEM technique to be suitable for usage on radiation-sensitive samples like biological tissues. Experiments show high effectiveness of the method, which improves both the gradient sensitivity of the signal and the signal to noise ratio.

    Original languageEnglish
    Article number112830
    JournalUltramicroscopy
    Volume207
    DOIs
    Publication statusPublished - Dec 2019

    Keywords

    • 3D topography
    • 68.37.Hk
    • Backscattered electrons detector
    • Reconstruction algorithm
    • Scanning electron microscopy

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