10-Gb/s direct modulation of widely tunable 1550-nm MEMS VCSEL

Sujoy Paul, Christian Gierl, Julijan Cesar, Quang Trung Le, Mohammadreza Malekizandi, Benjamin Kögel, Christian Neumeyr, Markus Ortsiefer, Franko Küppers

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35 Citations (Scopus)


We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiOx/SiNy-based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a lowtemperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of surface micromachining. More than 60 nm of mode-hop free continuous tuning with a center wavelength of 1554 nm is achieved. A maximum 3-dB small-signal modulation response (S21) bandwidth of 7.05 GHz is reported. Quasi-error-free operation of a back-to-back link is demonstrated at 10 Gb/s for a record 47-nm tuning range, showing the compatibility of the MEMS tunable VCSEL as a cost-effective optical source in access networks and interconnects.

Original languageEnglish
Article number7073611
JournalIEEE Journal of Selected Topics in Quantum Electronics
Issue number6
Publication statusPublished - 1 Nov 2015
Externally publishedYes


  • Direct modulation
  • Electro-thermal tuning
  • Micro-electro-mechanical system (MEMS)
  • Optical communication
  • Surface micromachining
  • Tunable
  • Vertical-cavity surfaceemitting laser (VCSEL)


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