ПРИМЕНЕНИЕ СОЕДИНЕНИЯ ПОЛИСАХАРИДА В ЛИТОГРАФИИ

Translated title of the contribution: APPLICATION OF A POLYSACCHARIDE COMPOUND IN LITHOGRAPHY

Albert Nasibulin (Inventor), Anton Bubis (Inventor), Артем Гребенко (Inventor)

Research output: PatentPatent

Translated title of the contributionAPPLICATION OF A POLYSACCHARIDE COMPOUND IN LITHOGRAPHY
Original languageRussian
Patent number2738112
Priority date15/11/19
Filing date8/12/20
Publication statusPublished - 8 Dec 2020

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